Journal Article

·2014 OPEN ACCESS

Electrical Characterization of Sol-Gel Derived TiO2Film on c-Si Substrate by Admittance Measurement

A. Evrim Saatci YTU , Orhan Özdemi̇r YTU

Advances in Materials Science and Engineering

Abstract

Transport and storage properties of sol-gel synthesized, namely, dip coating technique, titanium dioxide (TiO 2 ) thin film over crystalline silicon (c-Si), has been investigated by means of current-voltage (I-V) and admittance analysis within different ambient. Considering the work function of anatase TiO 2 film, determined by both FTIR and TG/DTA analysis, silver (Ag) as front metal electrode was chosen to hinder a barrier for charge carriers. Electrical analysis implied that Ag/TiO 2 /c-Si structure was actually constituted by Ag/TiO 2 /native silicon dioxide (SiO 2 )/c-Si [SIS] structure, in which SiO 2 layer was identified by FTIR analysis. Consequently, the electrical features of the film were interpreted in terms of SIS diode that is capable of explaining C-V features.

Keywords

Materials science Anatase Sol-gel Substrate (aquarium) Thin film Titanium dioxide Fourier transform infrared spectroscopy Silicon Dip-coating Characterization (materials science) Admittance Silicon dioxide Analytical Chemistry (journal) Chemical engineering Layer (electronics) Coating Optoelectronics Nanotechnology Composite material Photocatalysis Catalysis Electrical impedance

Subject Areas

Semiconductor materials and devices ·Electrical and Electronic Engineering ·Physical Sciences
Silicon Nanostructures and Photoluminescence ·Materials Chemistry ·Physical Sciences
Semiconductor materials and interfaces ·Atomic and Molecular Physics, and Optics ·Physical Sciences