Abstract
In recent years, linear matrix inequality-based design of controllers has received considerable attention and become very popular due to their ability to satisfy multiobjective requirements. However, an LMI based H2 state-feedback controller, having gap and acceleration parameters as states, for a 3 DoF vibration isolation stage having hybrid electromagnets, has not been researched yet. In this study, this type of controller is employed to minimize the effect of ground and direct disturbances on vibration isolation, zero-power, and protection of the levitation gap objectives. Moreover, the experimental setup used in this study has been designed to meet aforementioned objectives as well. The design parameters of the experimental setup are explicitly given and the effectiveness of the proposed method is shown with the experimental studies.